Carl Zeiss GeminiSEM 560

The Carl Zeiss GeminiSEM 560 is a top-of-the-line SEM. This SEM has a very large chamber with ability to inspect an entire 200 mm wafer without rotation (full +/- 100 mm in both X and Y), to allow full wafer inspection of 200 mm substrates. It also offers superior imaging at extremely low beam energies (< 100 eV).