YES-PB6-2P-CP Vacuum Cure Oven

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Applications

This YES-PB6-2P-CP Laminar Flow High Temperature (up to 450°C) Vacuum Cure Oven is a critical part of packaging technology infrastructure, to be used in many projects, including quantum related projects.

Capabilities
  • Supports sample sizes up to 200mm (up to 50 wafers)
  • 8 temperature profiles (up to 200 recipes)
  • Used for curing polyimide,
  • Epoxy and wafer to wafer bonding annealing, in particular for packaged integrated parts.
Estimated Arrival
Arrived
Projected Availability
Operational – installed and ready