Applications
This YES-PB6-2P-CP Laminar Flow High Temperature (up to 450°C) Vacuum Cure Oven is a critical part of packaging technology infrastructure, to be used in many projects, including quantum related projects.
Capabilities
- Supports sample sizes up to 200mm (up to 50 wafers)
- 8 temperature profiles (up to 200 recipes)
- Used for curing polyimide,
- Epoxy and wafer to wafer bonding annealing, in particular for packaged integrated parts.
Estimated Arrival
Arrived
Projected Availability
Operational – installed and ready